Publication:

SiGe tunnel field effect transistors: challenges for selective epitaxial growth

Date

2009
Meeting abstract
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dc.contributor.authorLoo, Roger
dc.contributor.authorIacopi, Francesca
dc.contributor.authorVanherle, Wendy
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVandooren, Anne
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorNguyen, Duy
dc.contributor.authorDoornbos, Gerben
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVanherle, Wendy
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorDoornbos, Gerben
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-18T00:10:12Z
dc.date.available2021-10-18T00:10:12Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15741
dc.source.conferenceMRS 2009 Spring Meeting Symposium AA: Semiconductor Nanowires
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
dc.title

SiGe tunnel field effect transistors: challenges for selective epitaxial growth

dc.typeMeeting abstract
dspace.entity.typePublication
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