Publication:
Building blocks for 32nm IC manufacturing
Date
| dc.contributor.author | Absil, Philippe | |
| dc.contributor.imecauthor | Absil, Philippe | |
| dc.date.accessioned | 2021-10-17T06:13:14Z | |
| dc.date.available | 2021-10-17T06:13:14Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13278 | |
| dc.source.conference | Applied Materials Technical Forum Asia | |
| dc.source.conferencedate | 7/11/2008 | |
| dc.source.conferencelocation | Hsinchu Taiwan | |
| dc.title | Building blocks for 32nm IC manufacturing | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |