Publication:
Direct copper electroplating
Date
| dc.contributor.author | Lantasov, Yuri | |
| dc.contributor.author | Palmans, Roger | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T13:14:10Z | |
| dc.date.available | 2021-10-14T13:14:10Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4516 | |
| dc.source.beginpage | 31 | |
| dc.source.conference | Advanced Metallization Conference; 3-5 October 2000; San Diego, Ca, USA. To be published in 2001. | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 31 | |
| dc.title | Direct copper electroplating | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |