Publication:
Biocompatible Hermetic Encapsulation of PMUTs for Usage in Implantable Medical Devices
| dc.contributor.author | Afshari Savojbolagh, Esmaeil | |
| dc.contributor.author | Houri, Samer | |
| dc.contributor.author | Verplancke, Rik | |
| dc.contributor.author | Rochus, Veronique | |
| dc.contributor.author | Cauwe, Maarten | |
| dc.contributor.author | Gijsenbergh, Pieter | |
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.author | Op de Beeck, Maaike | |
| dc.contributor.imecauthor | Houri, Samer | |
| dc.contributor.imecauthor | Rochus, Veronique | |
| dc.contributor.imecauthor | Gijsenbergh, Pieter | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Afshari Savojbolagh, Esmaeil | |
| dc.contributor.imecauthor | Op de Beeck, Maaike | |
| dc.contributor.orcidimec | Houri, Samer::0000-0002-2733-1366 | |
| dc.contributor.orcidimec | Rochus, Veronique::0000-0001-9680-5724 | |
| dc.contributor.orcidimec | Gijsenbergh, Pieter::0000-0003-0135-6968 | |
| dc.contributor.orcidimec | Rottenberg, Xavier::0000-0003-0920-1709 | |
| dc.contributor.orcidimec | Afshari Savojbolagh, Esmaeil::0000-0002-2020-0646 | |
| dc.contributor.orcidimec | Op de Beeck, Maaike::0000-0002-2700-6432 | |
| dc.date.accessioned | 2025-06-17T12:06:08Z | |
| dc.date.available | 2025-04-03T04:35:15Z | |
| dc.date.available | 2025-06-17T12:06:08Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/UFFC-JS60046.2024.10793944 | |
| dc.identifier.eisbn | 979-8-3503-7190-1 | |
| dc.identifier.isbn | 979-8-3503-7191-8 | |
| dc.identifier.issn | 1099-4734 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45489 | |
| dc.publisher | IEEE | |
| dc.source.conference | 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium | |
| dc.source.conferencedate | SEP 22-26, 2024 | |
| dc.source.conferencelocation | Taipei | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 4 | |
| dc.subject.keywords | MICROMACHINED ULTRASONIC TRANSDUCERS | |
| dc.subject.keywords | ARRAYS | |
| dc.title | Biocompatible Hermetic Encapsulation of PMUTs for Usage in Implantable Medical Devices | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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