Mapping conductance and carrier distributions in confined three-dimensional transistor structures

dc.contributor.author	Schulze, Andreas
dc.contributor.author	Eyben, Pierre
dc.contributor.author	Mody, Jay
dc.contributor.author	Paredis, Kristof
dc.contributor.author	Wouters, Lennaert
dc.contributor.author	Celano, Umberto
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Eyben, Pierre
dc.contributor.imecauthor	Paredis, Kristof
dc.contributor.imecauthor	Wouters, Lennaert
dc.contributor.imecauthor	Celano, Umberto
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Paredis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimec	Wouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimec	Celano, Umberto::0000-0002-2856-3847
dc.date.accessioned	2021-10-27T17:47:20Z
dc.date.available	2021-10-27T17:47:20Z
dc.date.issued	2019
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/33957
dc.identifier.url	https://doi.org/10.1007/978-3-030-15612-1_3
dc.source.beginpage	71
dc.source.book	Electrical Atomic Force Microscopy for Nanoelectronics
dc.source.endpage	106
dc.title	Mapping conductance and carrier distributions in confined three-dimensional transistor structures
dc.type	Book chapter
dspace.entity.type	Publication
Files
Publication available in collections:	Book chapters