Publication:
Atomic layer deposition of novel interface layers on III-V channel devices
Date
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| cris.virtual.orcid | 0000-0001-8220-870X | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-1577-6050 | |
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| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0002-8062-3165 | |
| cris.virtual.orcid | 0000-0003-3407-2742 | |
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| cris.virtualsource.orcid | 70ac7f56-1f12-4c30-bf36-971557e3129d | |
| dc.contributor.author | Tang, Fu | |
| dc.contributor.author | Jiang, Xiaoqiang | |
| dc.contributor.author | Xie, Qi | |
| dc.contributor.author | Givens, Michael | |
| dc.contributor.author | Maes, Jan | |
| dc.contributor.author | Sioncke, Sonja | |
| dc.contributor.author | Ivanov, Tsvetan | |
| dc.contributor.author | Nyns, Laura | |
| dc.contributor.author | Lin, Dennis | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.imecauthor | Xie, Qi | |
| dc.contributor.imecauthor | Givens, Michael | |
| dc.contributor.imecauthor | Maes, Jan | |
| dc.contributor.imecauthor | Nyns, Laura | |
| dc.contributor.imecauthor | Lin, Dennis | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2021-10-24T14:44:40Z | |
| dc.date.available | 2021-10-24T14:44:40Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29551 | |
| dc.source.beginpage | AA2-TuA8 | |
| dc.source.conference | AVS 17th International Conference on Atomic Layer Deposition - ALD | |
| dc.source.conferencedate | 15/07/2017 | |
| dc.source.conferencelocation | Denver, CO USA | |
| dc.title | Atomic layer deposition of novel interface layers on III-V channel devices | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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