Publication:

Line edge roughness measurement technique of fingerprint in block copolymer thin film

Date

2013
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorIsawa, Miki
dc.contributor.authorSakai, Kei
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorGronheid, Roel
dc.contributor.authorYoshida, Hiroshi
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-21T08:27:51Z
dc.date.available2021-10-21T08:27:51Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22527
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1678005
dc.source.beginpage868114
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXVII
dc.source.conferencedate25/02/2013
dc.source.conferencelocationSan Jose, CA USA
dc.title

Line edge roughness measurement technique of fingerprint in block copolymer thin film

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
26374.pdf
Size:
404.23 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions