Publication:
Demonstration of metal-gated low Vt n-MOSFETs using a Poly-Si/TaN/Dy2O3/SiON gate stack with a scaled EOT value
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1883 since deposited on 2021-10-16
Acq. date: 2025-10-23
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Views
1883 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations