Publication:
Demonstration of metal-gated low Vt n-MOSFETs using a Poly-Si/TaN/Dy2O3/SiON gate stack with a scaled EOT value
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1885 since deposited on 2021-10-16
Acq. date: 2025-12-08
Citations
Metrics
Views
1885 since deposited on 2021-10-16
Acq. date: 2025-12-08
Citations