Publication:

EXLE-SIMS: dramatically enhanced accuracy for dose loss metrology

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVos, Rita
dc.contributor.authorSalima, A.J.
dc.contributor.authorMerkulov, A.
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVos, Rita
dc.date.accessioned2021-10-17T12:14:59Z
dc.date.available2021-10-17T12:14:59Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14710
dc.source.beginpage109
dc.source.conference17th International Conference in Ion Implantation Technology - IIT
dc.source.conferencedate8/06/2008
dc.source.conferencelocationMonterey, CA USA
dc.source.endpage112
dc.title

EXLE-SIMS: dramatically enhanced accuracy for dose loss metrology

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
16932.pdf
Size:
889.46 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions