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Differential interference contrast microscopy of defects in As-grown and annealed Si wafers
Publication:
Differential interference contrast microscopy of defects in As-grown and annealed Si wafers
Date
1997
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Trauwaert, Marie-Astrid
;
Vanhellemont, Jan
;
Lambert, U.
;
Gräf, D.
;
Kenis, Karine
;
Mertens, Paul
;
Heyns, Marc
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1940
since deposited on 2021-09-30
Acq. date: 2025-12-07
Citations
Metrics
Views
1940
since deposited on 2021-09-30
Acq. date: 2025-12-07
Citations