Publication:

Wet etching of low loss lithium tantalate waveguides and heterogeneous lithium tantalate integration

Date

2025
Proceedings Paper
https://doi.org/10.1109/ipc65510.2025.11282158
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dc.contributor.authorNenezic, Patrick
dc.contributor.authorWithouck, Jorik
dc.contributor.authorVandekerckhove, Tom
dc.contributor.authorNiels, Margot
dc.contributor.authorBonito Oliva, Valeria
dc.contributor.authorBillet, Maximilien
dc.contributor.authorKuyken, Bart
dc.date.accessioned2026-07-15T14:50:06Z
dc.date.available2026-07-15T14:50:06Z
dc.date.createdwos2026
dc.date.issued2025
dc.description.abstractA new wet etching process is developed for lithium tantalate waveguide fabrication and propagation losses are measured. With such process, low loss structures can be fabricated without requiring etching machinery. Furthermore, it opens possibilities in realizing heterogeneously integrated lithium tantalate modulators using waveguides.
dc.identifier.doi10.1109/ipc65510.2025.11282158
dc.identifier.isbn979-8-3315-2560-6
dc.identifier.issn2374-0140
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59849
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherIEEE
dc.relation.ispartofseriesIEEE Photonics Conference
dc.source.beginpage1
dc.source.conferenceIEEE Photonics Conference (IPC)
dc.source.conferencedate2025-11-09
dc.source.conferencelocationSingapore
dc.source.endpage2
dc.source.journal2025 IEEE Photonics Conference (IPC)
dc.source.numberofpages2
dc.title

Wet etching of low loss lithium tantalate waveguides and heterogeneous lithium tantalate integration

dc.typeProceedings paper
dspace.entity.typePublication
imec.internal.crawledAt2025-12-23
imec.internal.sourcecrawler
imec.internal.wosCreatedAt2026-07-14
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