Publication:

The state-of-the art of semiconductor profiling

Date

2009
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-18T04:24:21Z
dc.date.available2021-10-18T04:24:21Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16422
dc.source.beginpage70
dc.source.conferenceAbstracts 6th International Conference on Silicon Epitaxy and Heterostructures - ICSI-6
dc.source.conferencedate17/05/2009
dc.source.conferencelocationLos Angeles, CA USA
dc.source.endpage71
dc.title

The state-of-the art of semiconductor profiling

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
19067.pdf
Size:
316.26 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions