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Combined IV and CV analysis of laser annealed carbon and boron implanted SiGe epitaxial layers
Publication:
Combined IV and CV analysis of laser annealed carbon and boron implanted SiGe epitaxial layers
Date
2010-10
Meeting abstract
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21010.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kobayashi, Daisuke
;
Bargallo Gonzalez, Mireia
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Hirose, Kazuyuki
;
Simoen, Eddy
;
Claeys, Cor
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Abstract
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1867
since deposited on 2021-10-18
408
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1867
since deposited on 2021-10-18
408
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations