Publication:

Extreme wafer thinning optimization for via-last applications

Date

2016
Proceedings Paper
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Author(s)

Jourdain, Anne  
;
De Vos, Joeri  
;
Inoue, Fumihiro  
;
Rebibis, Kenneth June  
;
Miller, Andy  
;
Beyer, Gerald  
;
Beyne, Eric  
;
Walsby, Edward  
;
Patel, Jash
;
Ansell, Oliver
;
Hopkins, Janet
;
Ashraf, Huma
;
Thomas, Dave

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Abstract

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1972 since deposited on 2021-10-23
Acq. date: 2026-06-11

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1972 since deposited on 2021-10-23
Acq. date: 2026-06-11

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