Publication:
Tuning, Modelling, and Verifying Effects of Intermixing on EUV Multilayer Mirror Performance via a Combined Simulation and Experimental Approach
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0003-2097-6994 | |
| cris.virtual.orcid | 0000-0001-6985-9663 | |
| cris.virtual.orcid | 0000-0002-2959-432X | |
| cris.virtual.orcid | 0000-0002-0923-4642 | |
| cris.virtual.orcid | 0000-0002-2169-940X | |
| cris.virtualsource.department | a3bc452e-a821-4caa-a4e0-07fa4d30b585 | |
| cris.virtualsource.department | 996620bb-af03-47d3-87ed-2e2aaf31be8d | |
| cris.virtualsource.department | 0ed0ad17-0b15-4c84-b55a-e2d02d830fa8 | |
| cris.virtualsource.department | a2a85a4e-355e-484d-b1fe-7bbdba1233a9 | |
| cris.virtualsource.department | e40ffda2-4d5d-4450-83e2-8f9eb0120908 | |
| cris.virtualsource.orcid | a3bc452e-a821-4caa-a4e0-07fa4d30b585 | |
| cris.virtualsource.orcid | 996620bb-af03-47d3-87ed-2e2aaf31be8d | |
| cris.virtualsource.orcid | 0ed0ad17-0b15-4c84-b55a-e2d02d830fa8 | |
| cris.virtualsource.orcid | a2a85a4e-355e-484d-b1fe-7bbdba1233a9 | |
| cris.virtualsource.orcid | e40ffda2-4d5d-4450-83e2-8f9eb0120908 | |
| dc.contributor.author | Dorney, Kevin | |
| dc.contributor.author | Nerke, Eva | |
| dc.contributor.author | Rook, Katrina | |
| dc.contributor.author | Checco, Antonio | |
| dc.contributor.author | Krasnov, Vitaly | |
| dc.contributor.author | Nalin Mehta, Ankit | |
| dc.contributor.author | Impagnatiello, Andrea | |
| dc.contributor.author | Klostermann, Ulrich | |
| dc.contributor.author | Dawes, Andy | |
| dc.contributor.author | Welling, Ulrich | |
| dc.contributor.author | Hoppe, Wolfgang | |
| dc.contributor.author | Lee, Meng | |
| dc.contributor.author | Philipsen, Vicky | |
| dc.date.accessioned | 2026-03-31T08:18:41Z | |
| dc.date.available | 2026-03-31T08:18:41Z | |
| dc.date.createdwos | 2026-02-20 | |
| dc.date.issued | 2025 | |
| dc.description.wosFundingText | This work has been enabled in part by the NanoIC pilot line. The acquisition and operation are jointly funded by the Chips Joint Undertaking, through the European Union's Digital Europe (101183266) and Horizon Europe programs (101183277), as well as by the participating states Belgium (Flanders), France, Germany, Finland, Ireland and Romania. For more information, visit nanoic-project.eu. | |
| dc.identifier.doi | 10.1117/12.3071890 | |
| dc.identifier.isbn | 978-1-5106-9320-3 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/58982 | |
| dc.language.iso | eng | |
| dc.provenance.editstepuser | greet.vanhoof@imec.be | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 136870Z | |
| dc.source.conference | Photomask Technology | |
| dc.source.conferencedate | 2025-09-22 | |
| dc.source.conferencelocation | Monterey | |
| dc.source.journal | PHOTOMASK TECHNOLOGY 2025 | |
| dc.source.numberofpages | 12 | |
| dc.title | Tuning, Modelling, and Verifying Effects of Intermixing on EUV Multilayer Mirror Performance via a Combined Simulation and Experimental Approach | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| imec.internal.crawledAt | 2026-02-23 | |
| imec.internal.source | crawler | |
| Files | ||
| Publication available in collections: |