Publication:
Integration and dielectric reliability of 30nm 1/2 pitch structures in Aurora LK HM
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1888 since deposited on 2021-10-17
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Acq. date: 2026-03-17
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Statistics
Views
1888 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-03-17
Citations