Integration and dielectric reliability of 30nm 1/2 pitch structures in Aurora LK HM

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Author(s)

Demuynck, Steven

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Versluijs, Janko

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Kellens, Kristof

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Struyf, Herbert

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Verdonck, Patrick

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De Roest, David

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Metrics

1880 since deposited on 2021-10-17

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Acq. date: 2025-10-24