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Metal oxide ALD films for low power sensor applications

Date

2012
Meeting abstract
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dc.contributor.authorBrongersma, Sywert
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.accessioned2021-10-20T10:09:25Z
dc.date.available2021-10-20T10:09:25Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20397
dc.source.beginpage2471
dc.source.conferenceECS Fall Meeting Symposium E2: Atomic Layer Deposition Applications 8
dc.source.conferencedate7/10/2012
dc.source.conferencelocationHonolulu, HI USA
dc.title

Metal oxide ALD films for low power sensor applications

dc.typeMeeting abstract
dspace.entity.typePublication
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