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Silicon layer used as a holes detector in thin HfO2 films deposited by atomic layer deposition
Publication:
Silicon layer used as a holes detector in thin HfO2 films deposited by atomic layer deposition
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Richard, Olivier
;
Bender, Hugo
;
Puurunen, Riikka
;
Kaushik, Vidya
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1780
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
Metrics
Views
1780
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations