Publication:

Printability estimation of EUV blank defect using actinic image

Date

2018
Proceedings Paper
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dc.contributor.authorYamane, Takeshi
dc.contributor.authorKamo, Takashi
dc.contributor.authorJonckheere, Rik
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.accessioned2021-10-26T10:03:23Z
dc.date.available2021-10-26T10:03:23Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32319
dc.identifier.urlhttps://doi.org/10.1117/12.2297503
dc.source.beginpage105831F
dc.source.conferenceExtreme Ultraviolet (EUV) Lithography IX
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.title

Printability estimation of EUV blank defect using actinic image

dc.typeProceedings paper
dspace.entity.typePublication
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