Publication:

Physics-informed deep learning approach for nanoindentation-based thin film analysis

Date

2025-OCT
Journal article
https://doi.org/10.1016/j.microrel.2025.115875
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dc.contributor.authorOzdemir, Yusuf Burak
dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorGonzalez, Mario
dc.contributor.authorMerckling, Clement
dc.contributor.imecauthorOzdemir, Yusuf Burak
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorMerckling, Clement
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecGonzalez, Mario::0000-0003-4374-4854
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.date.accessioned2025-08-25T03:55:55Z
dc.date.available2025-08-25T03:55:55Z
dc.date.issued2025-OCT
dc.identifier.doi10.1016/j.microrel.2025.115875
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/46107
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD
dc.source.journalMICROELECTRONICS RELIABILITY
dc.source.numberofpages9
dc.source.volume173
dc.subject.keywordsMECHANICAL-PROPERTIES
dc.subject.keywordsELASTIC-MODULUS
dc.subject.keywordsYIELD STRENGTH
dc.subject.keywordsINDENTATION
dc.subject.keywordsHARDNESS
dc.subject.keywordsRELIABILITY
dc.subject.keywordsBERKOVICH
dc.subject.keywordsSUBSTRATE
dc.subject.keywordsBEHAVIOR
dc.subject.keywordsLOAD
dc.title

Physics-informed deep learning approach for nanoindentation-based thin film analysis

dc.typeJournal article
dspace.entity.typePublication
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