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Effect of extreme surface roughness on the electrical characteristics of ultra-thin gate oxides
Publication:
Effect of extreme surface roughness on the electrical characteristics of ultra-thin gate oxides
Date
1999
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Houssa, Michel
;
Nigam, Tanya
;
Mertens, Paul
;
Heyns, Marc
Journal
Solid-State Electronics
Abstract
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1920
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations
Metrics
Views
1920
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations