Publication:

Accuracy in APT analysis: The case of boron in silicon

Date

2017
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorMorris, Richard
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.date.accessioned2021-10-24T09:06:06Z
dc.date.available2021-10-24T09:06:06Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28959
dc.source.conference79th IUVSTA Workshop
dc.source.conferencedate13/05/2017
dc.source.conferencelocationSardinia Italy
dc.title

Accuracy in APT analysis: The case of boron in silicon

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions