Publication:
Influence of mechanical stress on the electrical performance of polycrystalline-silicon resistors
Date
| dc.contributor.author | Nakabayashi, M. | |
| dc.contributor.author | Ohyama, Hidenori | |
| dc.contributor.author | Kobayashi, K. | |
| dc.contributor.author | Yoneoka, M. | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, C. | |
| dc.contributor.author | Takami, Y. | |
| dc.contributor.author | Sunaga, H. | |
| dc.contributor.author | Takizawa, H. | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-14T13:26:17Z | |
| dc.date.available | 2021-10-14T13:26:17Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4606 | |
| dc.source.conference | MRS Spring Meeting 2000. Symposium A:Amorphous and Heterogeneous Silicon Thin Films - 2000; 24-28 April 2000; San Francisco, Ca, | |
| dc.source.conferencelocation | ||
| dc.title | Influence of mechanical stress on the electrical performance of polycrystalline-silicon resistors | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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