Metal grating patterning on fiber facets by UV-based nano imprint and transfer lithography using optical alignment

dc.contributor.author	Scheerlinck, Stijn
dc.contributor.author	Dubruel, Peter
dc.contributor.author	Bienstman, Peter
dc.contributor.author	Schacht, Etienne
dc.contributor.author	Van Thourhout, Dries
dc.contributor.author	Baets, Roel
dc.contributor.imecauthor	Bienstman, Peter
dc.contributor.imecauthor	Van Thourhout, Dries
dc.contributor.imecauthor	Baets, Roel
dc.contributor.orcidimec	Bienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimec	Van Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimec	Baets, Roel::0000-0003-1266-1319
dc.date.accessioned	2021-10-18T02:40:19Z
dc.date.available	2021-10-18T02:40:19Z
dc.date.embargo	9999-12-31
dc.date.issued	2009-05
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/16167
dc.source.beginpage	1415
dc.source.endpage	1420
dc.source.issue	10
dc.source.journal	IEEE J. of Lightwave Technology
dc.source.volume	27
dc.title	Metal grating patterning on fiber facets by UV-based nano imprint and transfer lithography using optical alignment
dc.type	Journal article
dspace.entity.type	Publication
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