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CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing

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dc.contributor.authorRyckeboer, Eva
dc.contributor.authorNie, Xiaomin
dc.contributor.authorSubramanian, Ananth
dc.contributor.authorMartens, Daan
dc.contributor.authorBienstman, Peter
dc.contributor.authorClemmen, Stephane
dc.contributor.authorSeveri, Simone
dc.contributor.authorJansen, Roelof
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorBaets, Roel
dc.contributor.imecauthorRyckeboer, Eva
dc.contributor.imecauthorNie, Xiaomin
dc.contributor.imecauthorBienstman, Peter
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecRyckeboer, Eva::0000-0001-8648-3258
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.accessioned2021-10-23T14:28:32Z
dc.date.available2021-10-23T14:28:32Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27251
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2523727
dc.source.beginpage98911K
dc.source.conferenceSilicon Photonics and Photonics Integrated Circuits V
dc.source.conferencedate13/05/2016
dc.source.conferencelocationBrussels Belgium
dc.title

CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing

dc.typeProceedings paper
dspace.entity.typePublication
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