Publication:

Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions

Date

2024
Journal article
https://doi.org/10.1116/6.0004064
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dc.contributor.authorMerkulov, Alex
dc.contributor.imecauthorMerkulov, Alex
dc.contributor.orcidimecMerkulov, Alex::0000-0003-4101-0873
dc.date.accessioned2025-07-30T14:58:45Z
dc.date.available2024-12-31T16:56:43Z
dc.date.available2025-07-30T14:58:45Z
dc.date.issued2024
dc.identifier.doi10.1116/6.0004064
dc.identifier.issn2166-2746
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45027
dc.publisherA V S AMER INST PHYSICS
dc.source.beginpageArt. 064005
dc.source.endpageN/A
dc.source.issue6
dc.source.journalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
dc.source.numberofpages4
dc.source.volume42
dc.subject.keywordsDATA REDUCTION ALGORITHM
dc.subject.keywordsSIMS
dc.title

Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions

dc.typeJournal article
dspace.entity.typePublication
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