Publication:

Dopant and carrier profiling in FinFET-based structures

Date

2013-08
Dissertation
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dc.contributor.authorMody, Jay
dc.contributor.thesisadvisorVandervorst, Wilfried
dc.date.accessioned2021-10-21T10:08:19Z
dc.date.available2021-10-21T10:08:19Z
dc.date.embargo9999-12-31
dc.date.issued2013-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22815
dc.title

Dopant and carrier profiling in FinFET-based structures

dc.typePHD thesis
dspace.entity.typePublication
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