Publication:

Visualizing the nucleation of ALD layers on polymers

Date

2020
Proceedings Paper
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dc.contributor.authorAstoreca, Laura
dc.contributor.authorTabaei, Parinaz Saadat Esbah
dc.contributor.authorSchaubroeck, David
dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorMorent, Rino
dc.contributor.authorDe Smet, Herbert
dc.contributor.authorDe Geyter, Nathalie
dc.contributor.imecauthorAstoreca, Laura
dc.contributor.imecauthorSchaubroeck, David
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.date.accessioned2021-10-28T20:11:20Z
dc.date.available2021-10-28T20:11:20Z
dc.date.embargo9999-12-31
dc.date.issued2020
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34653
dc.source.conference20th International Conference on Atomic Layers Deposition (ALD 2020)
dc.source.conferencedate28/06/2020
dc.source.conferencelocationGhent Belgium
dc.title

Visualizing the nucleation of ALD layers on polymers

dc.typeProceedings paper
dspace.entity.typePublication
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