Publication:
SAMs (self-assembled monolayers) passivation of Cobalt microbumps for 3D applications
Date
| dc.contributor.author | Hou, Lin | |
| dc.contributor.author | Derakhshandeh, Jaber | |
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Gerets, Carine | |
| dc.contributor.author | De Preter, Inge | |
| dc.contributor.author | Rebibis, Kenneth June | |
| dc.contributor.author | Miller, Andy | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.imecauthor | Hou, Lin | |
| dc.contributor.imecauthor | Derakhshandeh, Jaber | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.imecauthor | Gerets, Carine | |
| dc.contributor.imecauthor | De Preter, Inge | |
| dc.contributor.imecauthor | Rebibis, Kenneth June | |
| dc.contributor.imecauthor | Miller, Andy | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.orcidimec | Derakhshandeh, Jaber::0000-0003-2448-9165 | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.date.accessioned | 2021-10-22T19:45:10Z | |
| dc.date.available | 2021-10-22T19:45:10Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25395 | |
| dc.identifier.url | http://www.advancedmetallizationconference.com/agenda.html | |
| dc.source.conference | 32nd Advanced Metallization Conference - AMC | |
| dc.source.conferencedate | 9/09/2015 | |
| dc.source.conferencelocation | Austin, TX USA | |
| dc.title | SAMs (self-assembled monolayers) passivation of Cobalt microbumps for 3D applications | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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