Publication:
Effect of chemical growth air filter for wafer storage before epitaxial growth
Date
| dc.contributor.author | Wada, Masayuki | |
| dc.contributor.author | Sano, Tomohiro | |
| dc.contributor.author | Leys, Frederik | |
| dc.contributor.author | Dilliway, G. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Snow, j. | |
| dc.contributor.author | Izumi, A. | |
| dc.contributor.author | Eitoku, A. | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-17T12:39:41Z | |
| dc.date.available | 2021-10-17T12:39:41Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14768 | |
| dc.source.conference | SEMATECH Meeting | |
| dc.source.conferencedate | 31/03/2008 | |
| dc.source.conferencelocation | Austin, TX US | |
| dc.title | Effect of chemical growth air filter for wafer storage before epitaxial growth | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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