Publication:
Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene lines
Date
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Lanckmans, Filip | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-15T04:59:21Z | |
| dc.date.available | 2021-10-15T04:59:21Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7678 | |
| dc.source.beginpage | 147 | |
| dc.source.endpage | 149 | |
| dc.source.issue | 3 | |
| dc.source.journal | IEEE Electron Device Letters | |
| dc.source.volume | 24 | |
| dc.title | Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene lines | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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