Publication:

Device challenges for logic scaling for sub-5 nm node

Date

2018

Meeting abstract

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Author(s)

;

Garcia Bardon, Marie

;

Yakimets, Dmitry

;

Schuddinck, Pieter

;

Ragnarsson, Lars-Ake

;

;

Parvais, Bertrand

;

Spessot, Alessio

;

Verkest, Diederik

;

Statistics

2030 since deposited on 2021-10-25

Acq. date: 2026-10-05