Publication:

Device challenges for logic scaling for sub-5 nm node

Date

2018

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

;

Garcia Bardon, Marie

;

Yakimets, Dmitry

;

Schuddinck, Pieter

;

Ragnarsson, Lars-Ake

;

;

Parvais, Bertrand

;

Spessot, Alessio

;

Verkest, Diederik

;

Metrics

2015 since deposited on 2021-10-25

1last month

Acq. date: 2025-12-15