Publication:

Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform

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1515 since deposited on 2022-09-09
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Acq. date: 2025-10-25

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1515 since deposited on 2022-09-09
395item.page.metrics.field.last-week
Acq. date: 2025-10-25

Citations