Publication:
Three-dimensional electrical profiling of carbon nanotube interconnects
Date
| dc.contributor.author | Hantschel, Thomas | |
| dc.contributor.author | Schulze, Andreas | |
| dc.contributor.author | Dathe, Andre | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Vereecke, Bart | |
| dc.contributor.author | Ke, Xiaoxing | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Hantschel, Thomas | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.contributor.imecauthor | van der Veen, Marleen | |
| dc.contributor.imecauthor | Vereecke, Bart | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.date.accessioned | 2021-10-20T11:27:28Z | |
| dc.date.available | 2021-10-20T11:27:28Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20777 | |
| dc.source.beginpage | DD15.32 | |
| dc.source.conference | MRS Spring Meeting Symposium DD: De Novo Carbon Materials | |
| dc.source.conferencedate | 9/04/2012 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Three-dimensional electrical profiling of carbon nanotube interconnects | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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