Publication:

Three-dimensional electrical profiling of carbon nanotube interconnects

Date

 
dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorDathe, Andre
dc.contributor.authorEyben, Pierre
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVereecke, Bart
dc.contributor.authorKe, Xiaoxing
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.accessioned2021-10-20T11:27:28Z
dc.date.available2021-10-20T11:27:28Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20777
dc.source.beginpageDD15.32
dc.source.conferenceMRS Spring Meeting Symposium DD: De Novo Carbon Materials
dc.source.conferencedate9/04/2012
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Three-dimensional electrical profiling of carbon nanotube interconnects

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections: