Publication:

Formation of epitaxial CoSi2 films on Si and on Si/Si80Ge20 (100) by reactive deposition epitaxy

Date

2002
Journal article
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Author(s)

Peto, G.
;
Molnar, G.
;
Kotai, E.
;
Dezsi, I.
;
Karsteen, M.
;
Sodervall, U.
;
Willander, M.
;
Caymax, Matty  
;
Loo, Roger  

Journal

Applied Physics Letters

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1991 since deposited on 2021-10-14
Acq. date: 2026-01-26

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1991 since deposited on 2021-10-14
Acq. date: 2026-01-26

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