Formation of epitaxial CoSi2 films on Si and on Si/Si80Ge20 (100) by reactive deposition epitaxy

Simple item page Full metadata Statistics

Author(s)

Peto, G.

;

Molnar, G.

;

Kotai, E.

;

Dezsi, I.

;

Karsteen, M.

;

Sodervall, U.

;

Willander, M.

;

;

Journal

Applied Physics Letters

Metrics

1988 since deposited on 2021-10-14

Acq. date: 2025-10-23