Publication:

Modelling of the RF self-actuation of electrostatic RF-MEMS devices

Date

2004
Proceedings Paper
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Author(s)

Rottenberg, Xavier  
;
Brebels, Steven  
;
Nauwelaers, Bart  
;
Mertens, Robert  
;
De Raedt, Walter  
;
Tilmans, Harrie  

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