Publication:
Introduction to microsystem technology
Date
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.author | Baert, Kris | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.date.accessioned | 2021-10-14T17:20:12Z | |
| dc.date.available | 2021-10-14T17:20:12Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5475 | |
| dc.source.conference | SEMI ITPC Conference; 12-15 November 2001; Hawaii, USA. | |
| dc.source.conferencelocation | ||
| dc.title | Introduction to microsystem technology | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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