Publication:
Scream process for very large area MEMS structures
Date
| dc.contributor.author | Erismis, Mehmet Akif | |
| dc.contributor.author | Pereira Neves, Hercules | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | Van Hoof, Chris | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | Van Hoof, Chris | |
| dc.date.accessioned | 2021-10-16T16:02:12Z | |
| dc.date.available | 2021-10-16T16:02:12Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12130 | |
| dc.source.beginpage | 31 | |
| dc.source.conference | 18th Workshop on Micromachining, Micromechanics and Microsystems - MME | |
| dc.source.conferencedate | 16/09/2007 | |
| dc.source.conferencelocation | Guimaraes Portugal | |
| dc.source.endpage | 33 | |
| dc.title | Scream process for very large area MEMS structures | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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