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Phase identification of self-forming Cu-Mn based diffusion barriers on p-SiOC:H and SiO2 dielectrics using x-ray absorption fine structures
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1892 since deposited on 2021-10-17
Acq. date: 2025-10-23
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Views
1892 since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations