Publication:

3D backside integration of FinFETs: Is there an impact on LF noise?

Date

2023
Journal article
https://doi.org/10.1016/j.sse.2023.108724
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorJourdain, Anne
dc.contributor.authorClaeys, Cor
dc.contributor.authorVeloso, Anabela
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.orcidimecJourdain, Anne::0000-0002-7610-0513
dc.date.accessioned2024-01-30T10:29:25Z
dc.date.available2023-09-10T17:26:46Z
dc.date.available2024-01-30T10:29:25Z
dc.date.issued2023
dc.identifier.doi10.1016/j.sse.2023.108724
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42513
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD
dc.source.beginpageArt. 108724
dc.source.endpageN/A
dc.source.issueSeptember
dc.source.journalSOLID-STATE ELECTRONICS
dc.source.numberofpages4
dc.source.volume207
dc.title

3D backside integration of FinFETs: Is there an impact on LF noise?

dc.typeJournal article
dspace.entity.typePublication
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