Publication:
Defect control in advanced high-mobility substrates
Date
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-16T00:58:53Z | |
| dc.date.available | 2021-10-16T00:58:53Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10234 | |
| dc.source.beginpage | 125 | |
| dc.source.conference | 2nd Conference on Microelectronics, Microsystems and Nanotechnology | |
| dc.source.conferencedate | 14/11/2004 | |
| dc.source.conferencelocation | Athens Greece | |
| dc.source.endpage | 130 | |
| dc.title | Defect control in advanced high-mobility substrates | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |