Publication:
Investigation of barrier and slurry effects on the galvanic corrosion of copper
Date
| dc.contributor.author | Ernur, Didem | |
| dc.contributor.author | Kondo, S. | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Ernur, Didem | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T21:35:51Z | |
| dc.date.available | 2021-10-14T21:35:51Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6311 | |
| dc.source.beginpage | 117 | |
| dc.source.endpage | 124 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 64 | |
| dc.title | Investigation of barrier and slurry effects on the galvanic corrosion of copper | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |