Publication:
Analysis of As, P diffusion and defect evolution during sub-millisecond non-melt laser annealing based on an atomistic kinetic Monte Carlo approach
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1961 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
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Metrics
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1961 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-08
Citations