Publication:
Reduction of silicon dioxide interfacial layer to 4.6 Å EOT by Al remote scavenging in high-j/metal gate stacks on Si
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
1 since deposited on 2021-10-21
Acq. date: 2025-12-09
Views
1927 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-09
Citations
Metrics
Downloads
1 since deposited on 2021-10-21
Acq. date: 2025-12-09
Views
1927 since deposited on 2021-10-21
1last month
Acq. date: 2025-12-09
Citations