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Conference contributions
Modelling of the hydrogen passivation kinetics of Si in dilute HF solutions
Publication:
Modelling of the hydrogen passivation kinetics of Si in dilute HF solutions
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Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Verhaverbeke, Steven
;
Meuris, Marc
;
Schmidt, Harald
;
Mertens, Paul
;
Heyns, Marc
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2049
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-06
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Metrics
Views
2049
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-06
Citations