Publication:

Investigation of advanced organic strippers for ULSI processing

Date

1994
Proceedings Paper
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dc.contributor.authorRotondaro, Antonio
dc.contributor.authorGluck, Ronald
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorClaeys, Cor
dc.contributor.authorHonda, K.
dc.contributor.authorDaraktchiev, I.
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-09-29T12:46:27Z
dc.date.available2021-09-29T12:46:27Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/323
dc.source.beginpage239
dc.source.conferenceOCG Microlithography Seminar INTERFACE
dc.source.conferencedate6/11/1994
dc.source.conferencelocationSan Diego, CA USA
dc.source.endpage254
dc.title

Investigation of advanced organic strippers for ULSI processing

dc.typeProceedings paper
dspace.entity.typePublication
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