Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Low temperature RTP for BCB curing
Publication:
Low temperature RTP for BCB curing
Copy permalink
Date
2007
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
16177.pdf
741.42 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ouaknine, Michel
;
Malik, Igor J.
;
Odera, Masato
;
Ishigaki, Toshikazu
;
Ueda, Takeshi
;
Fukada, Takashi
;
Yoo, Woo Sik
;
Soussan, Philippe
;
Muller, Philippe
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
1926
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations
Metrics
Views
1926
since deposited on 2021-10-16
Acq. date: 2025-12-15
Citations