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Microstructural studies by transmission electron microscopy of the formation of ultrathin PtSi layers with novel silicidation processes

Date

1999
Journal article
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dc.contributor.authorJin, S.
dc.contributor.authorBender, Hugo
dc.contributor.authorAlves Donaton, Ricardo
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-06T11:26:48Z
dc.date.available2021-10-06T11:26:48Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3539
dc.source.beginpage2577
dc.source.endpage2587
dc.source.issue6
dc.source.journalJournal of Materials Research
dc.source.volume14
dc.title

Microstructural studies by transmission electron microscopy of the formation of ultrathin PtSi layers with novel silicidation processes

dc.typeJournal article
dspace.entity.typePublication
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