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Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
Publication:
Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
Date
2017
Proceedings Paper
https://doi.org/10.1117/12.2257908
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37294.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ohashi, Takeyoshi
;
Yamaguchi, Atsuko
;
Hasumi, Kazuhisa
;
Inoue, Osamu
;
Ikota, Masami
;
Lorusso, Gian
;
Donadio, Gabriele Luca
;
Yasin, Farrukh
;
Rao, Siddharth
;
Kar, Gouri Sankar
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Abstract
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2111
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations
Metrics
Views
2111
since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations