Publication:

Readying directed self-assembly for patterning in semiconductor manufacturing

Date

2014
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Gronheid, Roel  
;
Chan, BT  
;
Pathangi Sriraman, Hari
;
Van Den Heuvel, Dieter  
;
MKuppuswamy, Vijaya Kumar
;
Doise, Jan  
;
Bekaert, Joost  
;
Rincon Delgadillo, Paulina  
;
Nealey, Paul
;
Cao, Yi
;
Her, YoungJun  
;
Sayan, Safak
;
Parnell, Doni
;
Romo Negreira, Ainhoa  
;
Somervell, Mark

Journal

Abstract

Description

Metrics

Views

1994 since deposited on 2021-10-22
Acq. date: 2025-10-23

Citations

Metrics

Views

1994 since deposited on 2021-10-22
Acq. date: 2025-10-23

Citations